Multifunctional ultrafast microprobes for on-the-machine measurements

Short Name: MicroProbes, Project Number: 17IND05
Image showing a coordinate measurement machine collecting data
A coordinate measurement machine collecting data

Multifunctional ultrafast microprobes for on‐the‐machine measurements

For the production of materials and coatings used in modern technology, surface quality monitoring is key: high-value manufacturing requires accurate measurement of properties such as roughness, elasticity or contamination.

As the demand for precision increases, tactile microprobes used to inspect components will need better characterisation. Furthermore, existing optical inspection techniques are inadequate for in-line use; microprobe-based systems, however, could be integrated into the production line to achieve fast and continuous quality control.


This project developed tactile microprobes and their industrial use for material surface measurements.

Probe tips have been developed for improved wear resistance and have their geometries characterised for better accuracy in various modes of use.

By integrating such devices into the manufacturing process, in-line product inspection could be 30 times faster compared to off-line methods; production-line efficiency and waste reduction through improved quality control therefore delivers direct economic and environmental benefits.

Industry users will also gain from the project results through good practice guides and training events.



Project website
Microprobe surface roughness characterization

Thesis - Master's Programme in Mechanical Engineering (MEC)

Calibrating a high-speed contact-resonance profilometer

Journal of Sensors and Sensor Systems

Application of contact-resonance AFM methods to polymer samples

Beilstein Journal of Nanotechnology

Applications of Tactile Microprobes for Surface Metrology

SMSI 2020 - Sensors and Instrumentation

Other Participants
Breitmeier Messtechnik GmbH (Germany)
GETec Microscopy GmbH (Austria)
nano analytik GmbH (Germany)
Phoenix Tribology Limited (United Kingdom)
RollResearch International Oy (Finland)
Technische Universitaet Braunschweig (Germany)
Thielenhaus Technologies GmbH (Germany)