Optimizing a Cantilever Measurement System towards High Speed, Nonreactive Contact-Resonance-Profilometry

Fahrbach M., Krieg L., Voss T., Bertke M., Xu J., Peiner E.

contact resonance spectroscopy; layer analysis; piezoresistive; tactile cantilever;automatic gain control; phase-locked-loop

Document type Proceedings
Journal title / Source Proceedings
Volume 2
Issue 13
Page numbers / Article number 889
Publisher's name MDPI AG
Publication date 2018-11-21
Conference name Eurosensors 2018
Conference date 09-09-2018 to 12-09-2018
Conference place Graz, Austria
ISSN 2504-3900
DOI 10.3390/proceedings2130889
Web URL https://www.mdpi.com/2504-3900/2/13/889
Language English

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