Optimizing a Cantilever Measurement System towards High Speed, Nonreactive Contact-Resonance-Profilometry
Fahrbach M., Krieg L., Voss T., Bertke M., Xu J., Peiner E.contact resonance spectroscopy; layer analysis; piezoresistive; tactile cantilever;automatic gain control; phase-locked-loop
| Document type | Proceedings |
| Journal title / Source | Proceedings |
| Volume | 2 |
| Issue | 13 |
| Page numbers / Article number | 889 |
| Publisher's name | MDPI AG |
| Publication date | 2018-11-21 |
| Conference name | Eurosensors 2018 |
| Conference date | 09-09-2018 to 12-09-2018 |
| Conference place | Graz, Austria |
| ISSN | 2504-3900 |
| DOI | 10.3390/proceedings2130889 |
| Web URL | https://www.mdpi.com/2504-3900/2/13/889 |
| Language | English |