In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection (Data)
MEMS piezoresistive cantilever sensors, dynamic mode, carbon nanoparticle, particle mass measurement
| Document type | Datasets |
| Journal title / Source | |
| Persistent Identifier | https://doi.org/10.5281/zenodo.5720561 |