Self-excited Contact Resonance Operation of a Tactile Piezoresistive Cantilever Microprobe with Diamond Tip (Data)
MEMS, microprobe, thermal actuator, piezoresistive cantilever, contact resonance
| Document type | Datasets |
| Journal title / Source | |
| DOI | 10.5281/zenodo.5703351 |
| Language | English |