In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection

Setiono A., Bertke M., Nyang’au W.O., Xu J., Fahrbach M., Kirsch I., Uhde E., Deutschinger A., Fantner E.J., Schwalb C. H., Wasisto H.S., Peiner E.

MEMS piezoresistive cantilever sensors, dynamic mode, carbon nanoparticle, particle mass measurement

Document type Article
Journal title / Source Sensors
Volume 20
Issue 3
Page numbers / Article number 618
Publisher's name MDPI AG
Publication date 2020-1-22
ISSN 1424-8220
DOI 10.3390/s20030618
Language English

Back to the list view