In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection
Setiono A., Bertke M., Nyang’au W.O., Xu J., Fahrbach M., Kirsch I., Uhde E., Deutschinger A., Fantner E.J., Schwalb C. H., Wasisto H.S., Peiner E.MEMS piezoresistive cantilever sensors, dynamic mode, carbon nanoparticle, particle mass measurement
Document type | Article |
Journal title / Source | Sensors |
Volume | 20 |
Issue | 3 |
Page numbers / Article number | 618 |
Publisher's name | MDPI AG |
Publication date | 2020-1-22 |
ISSN | 1424-8220 |
DOI | 10.3390/s20030618 |
Language | English |