Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure (Data)

Keywords:

electrothermal piezoresistive cantilever sensors, parasitic feedthrough subtraction, particle mass concentration measurement, cigarette smoke exposure

Document type Datasets
Journal title / Source
Persistent Identifier https://doi.org/10.5281/zenodo.5720610

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