Applications of Tactile Microprobes for Surface Metrology

Reuter C., Reum A., Fahrbach M., Peiner E., Brand U., Hofmann M. , Rangelow I.
Keywords:

piezoresistive cantilever, MEMS, atomic force microscopy, contact resonance, surfaceroughness

Document type Proceedings
Journal title / Source SMSI 2020 - Sensors and Instrumentation
Volume Chapter A6
Issue 2020
Page numbers / Article number 87-88
Publisher's name AMA Association for Sensors and Measurement
Publication date 2020-6
Conference name SMSI 2020
Conference date 22-06-2020 to 25-06-2020
Conference place Nuremberg, Germany
ISBN 978-3-9819376-2-6
Language English
Persistent Identifier https://www.ama-science.org/proceedings/details/3655

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