Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm

Brand U., XU M., Doering L., Langfahl-Klabes J., Behle H., Bütefisch S., Ahbe T., Peiner E., Völlmeke S., Frank T., Mickan B., Kiselev I., Hauptmannl M., Drexel M.
Keywords:

cantilever microprobe; high-speed; contact resonance; tip wear; piezo-resistive; mechanical damping; tip-testing standard

Document type Article
Journal title / Source Sensors 2019
Volume 19(6)
Issue 1410
Publisher's name MDPI AG
Publisher's address (city only) Basel
Publication date 2019-3-22
DOI 10.3390/s19061410
Web URL https://www.mdpi.com/1424-8220/19/6/1410
Language English

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