Customized piezoresistive microprobes for combined imaging of topography and mechanical properties
Fahrbach M., Friedrich S., Behle H., XU M., Cappella B., Brand U., Peiner E.Cantilever microprobe, Piezoresistive, Atomic force microscopy, Force–distance curves, Contact resonance, Lubricants
| Document type | Article |
| Journal title / Source | Measurement: Sensors |
| Volume | 15 |
| Page numbers / Article number | 100042 |
| Publisher's name | Elsevier BV |
| Publication date | 2021-6 |
| ISSN | 2665-9174 |
| DOI | 10.1016/j.measen.2021.100042 |
| Language | English |