Customized piezoresistive microprobes for combined imaging of topography and mechanical properties

Fahrbach M., Friedrich S., Behle H., XU M., Cappella B., Brand U., Peiner E.
Keywords:

Cantilever microprobe, Piezoresistive, Atomic force microscopy, Force–distance curves, Contact resonance, Lubricants

Document type Article
Journal title / Source Measurement: Sensors
Volume 15
Page numbers / Article number 100042
Publisher's name Elsevier BV
Publication date 2021-6
ISSN 2665-9174
DOI 10.1016/j.measen.2021.100042
Language English

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