Customized piezoresistive microprobes for combined imaging of topography and mechanical properties
Fahrbach M., Friedrich S., Behle H., XU M., Cappella B., Brand U., Peiner E.Cantilever microprobe, Piezoresistive, Atomic force microscopy, Force–distance curves, Contact resonance, Lubricants
Document type | Article |
Journal title / Source | Measurement: Sensors |
Volume | 15 |
Page numbers / Article number | 100042 |
Publisher's name | Elsevier BV |
Publication date | 2021-6 |
ISSN | 2665-9174 |
DOI | 10.1016/j.measen.2021.100042 |
Language | English |