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Optimizing a Cantilever Measurement System towards High Speed, Nonreactive Contact-Resonance-Profilometry (Data)


contact resonance spectroscopy, layer analysis, piezoresistive, tactile cantilever, automatic gain control, phase-locked-loop

Document type Datasets
Journal title / Source
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Project title (JRP)
17IND05: MicroProbes: Multifunctional ultrafast microprobes for on-the-machine measurements
Name of Call / Funding Programme
EMPIR 2017: Industry