Dataset for the publication "Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements"
surface topography measurement, roughness measurement, piezoresistive devices, microprobe, silicone fracture, tip characterization, fracture mechanics, surface cracks
| Document type | Datasets |
| Journal title / Source | |
| Publication date | 2022-3-14 |
| Web URL | https://oar.ptb.de/resources/show/10.7795/720.20220314 |
| Language | English |
| Persistent Identifier | 10.7795/720.20220314 |