Calibrating a high-speed contact-resonance profilometer
Fahrbach M., Friedrich S., Cappella B., Peiner E.piezoresistive microprobes, AFM
| Document type | Article |
| Journal title / Source | Journal of Sensors and Sensor Systems |
| Volume | 9 |
| Issue | 2 |
| Page numbers / Article number | 179-187 |
| Publisher's name | Copernicus GmbH |
| Publication date | 2020-7 |
| ISSN | 2194-878X |
| DOI | 10.5194/jsss-9-179-2020 |
| Web URL | https://jsss.copernicus.org/articles/9/179/2020/#section11 |
| Language | English |