Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements

XU M., Zhou Z., Ahbe T., Peiner E., Brand U.

roughness measurement, piezoresistive microprobe, silicon fracture, tip characterization

Document type Article
Journal title / Source Sensors
Volume 22
Issue 3
Page numbers / Article number 1298
Publisher's name MDPI AG
Publication date 2022-2
ISSN 1424-8220
DOI 10.3390/s22031298
Language English

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