Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements
XU M., Zhou Z., Ahbe T., Peiner E., Brand U.roughness measurement, piezoresistive microprobe, silicon fracture, tip characterization
| Document type | Article |
| Journal title / Source | Sensors |
| Volume | 22 |
| Issue | 3 |
| Page numbers / Article number | 1298 |
| Publisher's name | MDPI AG |
| Publication date | 2022-2 |
| ISSN | 1424-8220 |
| DOI | 10.3390/s22031298 |
| Web URL | https://www.mdpi.com/1424-8220/22/3/1298 |
| Language | English |