Mode analysis for long, undamped cantilevers with added diamond tips of varying length for fast roughness measurements

Behle H., Brand U.
Keywords:

FEM, Mode analysis, diamond tips, piezoresistive Si-cantilever, roughness measurements

Document type Proceedings
Journal title / Source SMSI 2020 - Sensors and Instrumentation
Volume Chapter P2
Issue 2020
Page numbers / Article number 238-239
Publisher's name AMA Association for Sensors and Measurement
Publication date 2020-6
Conference name SMSI 2020
Conference date 22-06-2020 to 25-06-2020
Conference place Nuremberg, Germany
ISBN 978-3-9819376-2-6
Language English
Persistent Identifier https://www.ama-science.org/proceedings/details/3729

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