The gateway to Europe's
integrated metrology community.

Towards a documentary standard for an ionisation vacuum gauge

Short Name: Ion gauge, Project Number: 16NRM05
Image showing a close up of a vacuum system
Close up of a vacuum system

More reliable vacuum measurements for materials researchers and electronics manufacturers

High and ultra-high vacuums are used for cutting edge materials research and in the production of microelectronics. Ionisation gauges are the only method for measuring pressure in such vacuums. Different approaches to constructing ionisation gauges, and different gasses used for the ionisation process, has lead to significant differences in the relative sensitivity factors between them with all lacking long-term stability. The performance of the approaches could be greatly improved by standardisation.


This project will use results from EMRP project IND12 Vacuum and EMPIR project 14SIP01 Vacuum ISO to specify all relevant parameters for an improved and standardised ionisation gauge, including gathering data on the relative sensitivities of gasses used in different gauge types. The technical results will inform new ISO standards on ionisation gauges. A standardised ionisation gauge with long term stability will provide a reliable reference standard for calibration laboratories, and be easily reproduced by manufacturers, allowing them to meet the forthcoming standard. This will provide greater accuracy to the vacuum market, and the many industries it supports.


EMPIR project 20SIP01 ISO Gauge builds on this work.

Project website
Other Participants
European Organization for Nuclear Research (Europe)
Faculdade de Ciências e Tecnologia Universidade Nova de Lisboa (Portugal)
INFICON AG (Liechtenstein)
VACOM Vakuum Komponenten & Messtechnik GmbH (Germany)