Reference-free grazing incidence x-ray fluorescence and reflectometry as a methodology for independent validation of x-ray reflectometry on ultrathin layer stacks and a depth-dependent characterization

Honicke P., Detlefs B., Nolot E., Kayser Y., Mühle U., Pollakowski B., Beckhoff B.

XRR, GIXRF, nanolayers

Document type Article
Journal title / Source Journal of Vacuum Science & Technology A
Volume 37
Issue 4
Page numbers / Article number 041502
Publisher's name American Vacuum Society
Publication date 2019-7
ISSN 0734-2101, 1520-8559
DOI 10.1116/1.5094891
Language English

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