The gateway to Europe's
integrated metrology community.

Welcome to the EURAMET Repository Link

The EURAMET Repository Link is an online service providing links to scientific papers and datasets published within the European Partnership on Metrology (Partnership), the European Metrology Programme for Innovation and Research (EMPIR), the European Metrology Research Programme (EMRP), and projects funded by iMERA-Plus.

References
A surrogate model enables a Bayesian approach to the inverse problem of scatterometry
Heidenreich S, Gross H, Henn M-A, Elster C, Bär M
2014

Journal of Physics: Conference Series 490 (2014) , 012007

Type: Article
Project title: NEW04: Uncertainty: Novel mathematical and statistical approaches to uncertainty evaluation
Name of Call / Funding Programme: EMRP A169: Call 2011 Metrology for New Technologies
Improved reconstruction of critical dimensions in exteme ultraviolet scatterometry by modellig systematic errors
Henn M-A, Gross H, Heidenreich S, Scholze F, Elster C, Bär M
2014

Measurement Science and Technology 25 (2014) , 044003 (9pp)

Type: Article
Project title: NEW04: Uncertainty: Novel mathematical and statistical approaches to uncertainty evaluation
Name of Call / Funding Programme: EMRP A169: Call 2011 Metrology for New Technologies
Setup of a high-precision profilometer and comparison of tactile and optical measurements of standards
Nouira H, Salgado J-A, El-Hayek N, Ducourtieux S, Delvallée A, Anwer N
2014

Measurement Science and Technology 25 (2014)

Type: Article
Project title: IND10: Form: Optical and tactile metrology for absolute form characterisation
Name of Call / Funding Programme: EMRP A169: Call 2010 Industry
Investigations of the influence of common approximations in scatterometry for dimensional nanometrology
Endres J., Diener A., Wurm M., Bodermann B.
2014

Measurement Science and Technology 25 (2014)

Type: Article
Project title: IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
Name of Call / Funding Programme: EMRP A169: Call 2010 Industry
Measurements of CD and sidewall profile of EUV photomask structures using CD-AFM and Tilting-AFM
Gaoliang D., Hahm K., Scholze F., Henn M.-A., Gross H., Fluegge J., Bosse H.
2014

Meas. Sci. Technol. 25 (2014)

Type: Article
Project title: IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
Name of Call / Funding Programme: EMRP A169: Call 2010 Industry
In-situ nondestructive characterization of the normal spring constant of AFM cantilevers
Gao Sai, Brand Uwe
2014

Measurement Science and Technology 25 (2014)

Type: Article
Project title: NEW05: MechProNO: Traceable measurement of mechanical properties of nano-objects
Name of Call / Funding Programme: EMRP A169: Call 2011 Metrology for New Technologies
Scatterometer for characterization of diffractive optical elements
Husu H., Saastamoinen T., Laukkanen J., Siitonen S., Turunen J., Lassila A.
2014

Measurement Science and Technology 25 (2014)

Type: Article
Project title: IND17: Scatterometry: Metrology of small structures for the manufacturing of electronic and optical devices
Name of Call / Funding Programme: EMRP A169: Call 2010 Industry
Magnetothermoelectric figure of merit of Co/Cu multilayers
Hu X. K., Krzysteczko P., Liebing N., Serrano-Guisan S., Rott K., Reiss G., Kimling J., Böhnert T., Nielsch K., Schumacher H. W.
2014

APPLIED PHYSICS LETTERS 104 (2014)

Type: Article
Project title: EXL04: SpinCal: Spintronics and spin-caloritronics in magnetic nanosystems
Name of Call / Funding Programme: EMRP A169: Call 2012 Open excellence call
Towards quantitative modelling of surface deformation of polymer micro-structures under tactile scanning measurement
Li ZL, Brand UB, Ahbe TA
2014

Measurement Science and Technology 25 (2014) , 044010

Type: Article
Project title: IND05: MeProVisc: Dynamic Mechanical Properties and Long-term Deformation Behaviour of Viscous Materials
Name of Call / Funding Programme: EMRP A169: Call 2010 Industry
Optical mirror referenced capacitive flatness measurement and straightness evaluation of translation stages
Kren P.
2014

Measurement Science and Technology 25 (2014) , 5pp

Type: Article
Project title: IND10: Form: Optical and tactile metrology for absolute form characterisation
Name of Call / Funding Programme: EMRP A169: Call 2010 Industry
5996 RESULT(S)