UV/ozone cleaning of mass standards: results on the correlation between mass and surface chemical state
Fuchs Peter, Marti Kilian, Grgic Goran, Russi Stefanmass standards, XPS, UV/ozone, surface chemistry
Document type | Article |
Journal title / Source | Metrologia |
Peer-reviewed article | 1 |
Volume | 51 |
Issue | 5 |
Page numbers / Article number | 387 |
Publisher's name | IOP Publishing |
Publisher's address (city only) | Bristol |
Publication date | 2014-6-25 |
ISSN | 0026-1394 |
DOI | 10.1088/0026-1394/51/5/387 |
Web URL | http://iopscience.iop.org/article/10.1088/0026-1394/51/5/387 |
Language | English |