Atom probe tomography analysis of SiGe fins embedded in SiO 2 : Facts and artefacts
Melkonyan D., Fleischmann C., Arnoldi L., Demeulemeester J., Kumar A., Bogdanowicz J., Vurpillot F., Vandervorst W.Atom probe tomography, Tip shape, FinFET, Local magnification, Trajectory overlaps
| Document type | Article |
| Journal title / Source | Ultramicroscopy |
| Volume | 179 |
| Page numbers / Article number | 100-107 |
| Publisher's name | Elsevier BV |
| Publication date | 2017-8 |
| ISSN | 0304-3991 |
| DOI | 10.1016/j.ultramic.2017.04.006 |
| Web URL | https://lirias2repo.kuleuven.be/rest/bitstreams/515063/retrieve |
| Language | English |