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Atom probe tomography analysis of SiGe fins embedded in SiO 2 : Facts and artefacts

Melkonyan D., Fleischmann C., Arnoldi L., Demeulemeester J., Kumar A., Bogdanowicz J., Vurpillot F., Vandervorst W.
Keywords:

Atom probe tomography, Tip shape, FinFET, Local magnification, Trajectory overlaps

Document type Article
Journal title / Source Ultramicroscopy
Volume 179
Page numbers / Article number 100-107
Publisher's name Elsevier BV
Publication date 2017-8
ISSN 0304-3991
DOI 10.1016/j.ultramic.2017.04.006
Web URL https://lirias2repo.kuleuven.be/rest/bitstreams/515063/retrieve
Language English

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Information

Project title (JRP)
14IND01: 3DMetChemIT: Advanced 3D chemical metrology for innovative technologies
Name of Call / Funding Programme
EMPIR 2014: Industry