Atom probe tomography analysis of SiGe fins embedded in SiO 2 : Facts and artefacts
Melkonyan D., Fleischmann C., Arnoldi L., Demeulemeester J., Kumar A., Bogdanowicz J., Vurpillot F., Vandervorst W.Atom probe tomography, Tip shape, FinFET, Local magnification, Trajectory overlaps
Document type | Article |
Journal title / Source | Ultramicroscopy |
Volume | 179 |
Page numbers / Article number | 100-107 |
Publisher's name | Elsevier BV |
Publication date | 2017-8 |
ISSN | 0304-3991 |
DOI | 10.1016/j.ultramic.2017.04.006 |
Web URL | https://lirias2repo.kuleuven.be/rest/bitstreams/515063/retrieve |
Language | English |