The gateway to Europe's
integrated metrology community.

Atom probe tomography analysis of SiGe fins embedded in SiO 2 : Facts and artefacts

Melkonyan D., Fleischmann C., Arnoldi L., Demeulemeester J., Kumar A., Bogdanowicz J., Vurpillot F., Vandervorst W.

Atom probe tomography, Tip shape, FinFET, Local magnification, Trajectory overlaps

Document type Article
Journal title / Source Ultramicroscopy
Volume 179
Page numbers / Article number 100-107
Publisher's name Elsevier BV
Publication date 2017-8
ISSN 0304-3991
DOI 10.1016/j.ultramic.2017.04.006
Language English

Back to the list view


Project title (JRP)
14IND01: 3DMetChemIT: Advanced 3D chemical metrology for innovative technologies
Name of Call / Funding Programme
EMPIR 2014: Industry