Universal Equation for Argon Gas Cluster Sputtering Yields
Seah M.Pgold, Irganox1010, OLED, polymers, silicon, silicon dioxide.
Document type | Article |
Journal title / Source | Journal of Physical Chemistry C |
Peer-reviewed article | 1 |
Volume | 117 |
Issue | (24), |
Page numbers / Article number | pp 12622–12632 |
Publisher's name | ACS Publications |
Publisher's address (city only) | Washington DC |
Publication date | 2019-5-13 |
ISSN | 1932-7447 |
DOI | 10.1021/jp402684c |
Web URL | http://pubs.acs.org/doi/abs/10.1021/jp402684c |
Language | English |