Universal Equation for Argon Gas Cluster Sputtering Yields

Seah M.P

gold, Irganox1010, OLED, polymers, silicon, silicon dioxide.

Document type Article
Journal title / Source Journal of Physical Chemistry C
Peer-reviewed article 1
Volume 117
Issue (24),
Page numbers / Article number pp 12622–12632
Publisher's name ACS Publications
Publisher's address (city only) Washington DC
Publication date 2019-5-13
ISSN 1932-7447
DOI 10.1021/jp402684c
Web URL http://pubs.acs.org/doi/abs/10.1021/jp402684c
Language English

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