Sputtering Yields for Gold Using Argon Gas Cluster Ion Beams
Yang L., Seah M.P., Gilmore I.S.Air cluster; GCIB; Gold; Sputtering yield
Document type | Article |
Journal title / Source | The journal of Physical Chemistry |
Peer-reviewed article | 1 |
Volume | 116 |
Issue | 44 |
Page numbers / Article number | 23735 – 23741 |
Publisher's name | ACS |
Publisher's address (city only) | Washington DC |
Publication date | 2012-10-11 |
ISSN | 1932-7447 |
DOI | 10.1021/jp307203f |
Web URL | http://pubs.acs.org/doi/abs/10.1021/jp307203f |
Language | English |