Sputtering Yields for Gold Using Argon Gas Cluster Ion Beams

Yang L., Seah M.P., Gilmore I.S.

Air cluster; GCIB; Gold; Sputtering yield

Document type Article
Journal title / Source The journal of Physical Chemistry
Peer-reviewed article 1
Volume 116
Issue 44
Page numbers / Article number 23735 – 23741
Publisher's name ACS
Publisher's address (city only) Washington DC
Publication date 2012-10-11
ISSN 1932-7447
DOI 10.1021/jp307203f
Web URL http://pubs.acs.org/doi/abs/10.1021/jp307203f
Language English

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