Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence
Soltwisch V., Honicke P., Kayser Y., Eilbracht J., Probst J., Scholze F., Beckhoff B.GIXRF, nanostructure characterization, FEM
Document type | Article |
Journal title / Source | Nanoscale |
Publisher's name | Royal Society of Chemistry (RSC) |
Publication date | 2018 |
ISSN | 2040-3364, 2040-3372 |
DOI | 10.1039/C8NR00328A |
Web URL | https://arxiv.org/abs/1801.04157 |
Language | English |