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Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence

Soltwisch V., Honicke P., Kayser Y., Eilbracht J., Probst J., Scholze F., Beckhoff B.
Keywords:

GIXRF, nanostructure characterization, FEM

Document type Article
Journal title / Source Nanoscale
Publisher's name Royal Society of Chemistry (RSC)
Publication date 2018
ISSN 2040-3364, 2040-3372
DOI 10.1039/C8NR00328A
Web URL https://arxiv.org/abs/1801.04157
Language English

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Information

Project title (JRP)
14IND01: 3DMetChemIT: Advanced 3D chemical metrology for innovative technologies
Name of Call / Funding Programme
EMPIR 2014: Industry