Reference-free, depth-dependent characterization of nanolayers and gradient systems with advanced grazing incidence X-ray fluorescence analysis

Honicke P., Detlefs B., Muller M., Darlatt E., Nolot E., Grampeix H., Beckhoff B.

GIXRF, XRR, depth profiling, ultra-shallow implants, nanolaminates, tetralactam macrocycle self-assembled multilayers

Document type Article
Journal title / Source pss(a) - ALTECH Proc
Peer-reviewed article 1
Volume 212
Issue 3
Page numbers / Article number 523-528
Publisher's name Wiley
Publisher's address (city only) Honoken
Publication date 2015-2-5
DOI 10.1002/pssa.201400204
Language English

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