Reference-free, depth-dependent characterization of nanolayers and gradient systems with advanced grazing incidence X-ray fluorescence analysis
Honicke P., Detlefs B., Muller M., Darlatt E., Nolot E., Grampeix H., Beckhoff B.GIXRF, XRR, depth profiling, ultra-shallow implants, nanolaminates, tetralactam macrocycle self-assembled multilayers
Document type | Article |
Journal title / Source | pss(a) - ALTECH Proc |
Peer-reviewed article | 1 |
Volume | 212 |
Issue | 3 |
Page numbers / Article number | 523-528 |
Publisher's name | Wiley |
Publisher's address (city only) | Honoken |
Publication date | 2015-2-5 |
DOI | 10.1002/pssa.201400204 |
Web URL | http://onlinelibrary.wiley.com/doi/10.1002/pssa.201400204/abstract |
Language | English |