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Development and Synchrotron-Based Characterization of Al and Cr Nanostructures as Potential Calibration Samples for 3D Analytical Techniques

Dialameh M., Ferrarese Lupi F., Honicke P., Kayser Y., Beckhoff B., Weimann T., Fleischmann C., Vandervorst W., Dubček P., Pivac B., Perego M., Seguini G., De Leo N., Boarino L.
Keywords:

SIMS, APT, GISAXS, 3D nanostructures, di-block copolymers

Document type Article
Journal title / Source physica status solidi (a)
Volume 215
Issue 6
Page numbers / Article number 1700866
Publisher's name Wiley
Publication date 2017-12
ISSN 1862-6300
DOI 10.1002/pssa.201700866
Language English

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Name of Call / Funding Programme
EMPIR 2014: Industry