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SIMS of Organic Materials—Interface Location in Argon Gas Cluster Depth Profiles Using Negative Secondary Ions

Havelund R., Seah M. P., Tiddia M., Gilmore I. S.
Keywords:

SIMS

Document type Article
Journal title / Source Journal of The American Society for Mass Spectrometry
Volume 29
Issue 4
Page numbers / Article number 774-785
Publisher's name Springer US
Publication date 2018-2-21
ISSN 1044-0305, 1879-1123
DOI 10.1007/s13361-018-1905-2
Web URL https://link.springer.com/article/10.1007%2Fs13361-018-1905-2
Language English

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Information

Project title (JRP)
14IND01: 3DMetChemIT: Advanced 3D chemical metrology for innovative technologies
Name of Call / Funding Programme
EMPIR 2014: Industry