SIMS of Delta Layers in Organic Materials: Amount of Substance, Secondary Ion Species, Matrix Effects, and Anomalous Structures in Argon Gas Cluster Depth Profiles
Seah M.P., Havelund R., Gilmore I.S.mass-spectrometry, sputtering yields, response function, impurity layers, semiconductors, suppression, interfaces, emission, beams
Document type | Article |
Journal title / Source | The Journal of Physical Chemistry C |
Volume | 120 |
Issue | 46 |
Page numbers / Article number | 26328–26335 |
Publisher's name | American Chemical Society |
Publisher's address (city only) | Washington |
Publication date | 2017-10-26 |
ISSN | 1932-7455 |
DOI | 10.1021/acs.jpcc.6b08646 |
Web URL | http://pubs.acs.org/doi/abs/10.1021/acs.jpcc.6b08646 |
Language | English |