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SIMS of Delta Layers in Organic Materials: Amount of Substance, Secondary Ion Species, Matrix Effects, and Anomalous Structures in Argon Gas Cluster Depth Profiles

Seah M.P., Havelund R., Gilmore I.S.
Keywords:

mass-spectrometry, sputtering yields, response function, impurity layers, semiconductors, suppression, interfaces, emission, beams

Document type Article
Journal title / Source The Journal of Physical Chemistry C
Volume 120
Issue 46
Page numbers / Article number 26328–26335
Publisher's name American Chemical Society
Publisher's address (city only) Washington
Publication date 2017-10-26
ISSN 1932-7455
DOI 10.1021/acs.jpcc.6b08646
Web URL http://pubs.acs.org/doi/abs/10.1021/acs.jpcc.6b08646
Language English

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Information

Project title (JRP)
14IND01: 3DMetChemIT: Advanced 3D chemical metrology for innovative technologies
Name of Call / Funding Programme
EMPIR 2014: Industry