Direct approach to determine the size setting error and size resolution of an optical particle counter

Geisler Mathias, Hensey Garry

cleanroom, light scattering, airborne particle counters, particle contamination, quality assurance, size resolution, calibration

Document type Article
Journal title / Source Review of Scientific Instruments
Volume 91
Issue 4
Page numbers / Article number 045105
Publisher's name AIP Publishing
Publication date 2020-4
ISSN 0034-6748, 1089-7623
DOI 10.1063/1.5142907
Language English

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