Definition of a nanoindentation-based methodology to optimize process parameters of coating deposition on silicon wafer
Galetto M., Genta G., Maculotti G., Giorio L., Marchiandi G.Surface integrity, Coating, Silicon
| Document type | Article |
| Journal title / Source | Procedia CIRP |
| Volume | 138 |
| Page numbers / Article number | 1055-1060 |
| Publisher's name | Elsevier BV |
| Publication date | 2026-1-1 |
| ISSN | 2212-8271 |
| DOI | 10.1016/j.procir.2026.01.182 |