The gateway to Europe's
integrated metrology community.

4-Nitrobenzene Grafted in Porous Silicon: Application to Optical Lithography

Tiddia M.V., Mula G., Sechi E., Vacca A., Cara E., De Leo N., Fretto M., Boarino L.
Keywords:

Porous silicon, Optical lithography, 4-Nitrobenzenediazonium, grafting, Improved chemical resistance

Document type Article
Journal title / Source Nanoscale Research Letters
Volume 11
Issue 436
Page numbers / Article number 1-10
Publisher's name SpringerOpen
Publisher's address (city only) London
Publication date 2016-9-29
ISSN 1556-276X
DOI 10.1186/s11671-016-1654-8
Web URL https://nanoscalereslett.springeropen.com/articles/10.1186/s11671-016-1654-8
Language English

Back to the list view

Information

Project title (JRP)
14IND01: 3DMetChemIT: Advanced 3D chemical metrology for innovative technologies
Name of Call / Funding Programme
EMPIR 2014: Industry