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4-Nitrobenzene Grafted in Porous Silicon: Application to Optical Lithography

Tiddia M.V., Mula G., Sechi E., Vacca A., Cara E., De Leo N., Fretto M., Boarino L.

Porous silicon, Optical lithography, 4-Nitrobenzenediazonium, grafting, Improved chemical resistance

Document type Article
Journal title / Source Nanoscale Research Letters
Volume 11
Issue 436
Page numbers / Article number 1-10
Publisher's name SpringerOpen
Publisher's address (city only) London
Publication date 2016-9-29
ISSN 1556-276X
DOI 10.1186/s11671-016-1654-8
Language English

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Project title (JRP)
14IND01: 3DMetChemIT: Advanced 3D chemical metrology for innovative technologies
Name of Call / Funding Programme
EMPIR 2014: Industry