Characterization of High-k Nanolayers by Grazing Incidence X-ray Spectrometry

Muller M., Honicke P., Detlefs B., Fleischmann C.

GIXRF; layer thickness; gate stack; reference-free analysis, ALD

Document type Article
Journal title / Source Materials
Peer-reviewed article 1
Volume 7
Issue 4
Page numbers / Article number 3147-3159
Publisher's name MDPI
Publisher's address (city only) Basel Switzeland
Publication date 2014-4-17
ISSN 1996-1944
DOI 10.3390/ma7043147
Language English

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