Characterization of High-k Nanolayers by Grazing Incidence X-ray Spectrometry
Muller M., Honicke P., Detlefs B., Fleischmann C.GIXRF; layer thickness; gate stack; reference-free analysis, ALD
Document type | Article |
Journal title / Source | Materials |
Peer-reviewed article | 1 |
Volume | 7 |
Issue | 4 |
Page numbers / Article number | 3147-3159 |
Publisher's name | MDPI |
Publisher's address (city only) | Basel Switzeland |
Publication date | 2014-4-17 |
ISSN | 1996-1944 |
DOI | 10.3390/ma7043147 |
Web URL | http://www.mdpi.com/1996-1944/7/4/3147 |
Language | English |