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Interlaboratory Comparison and Reproducibility of On-Wafer $S$-Parameter Measurements Up to 220 GHz

Ausden L., Wang L., Chen Y., Liu T., Hara S., Chakarothai J., Choi H., Koo H., Shang X., Rumiantsev A.
Keywords:

Measurement comparison, on-wafer measurement, S-parameters, vector network analyzer

Document type Proceedings
Journal title / Source 2026 107th ARFTG Microwave Measurement Conference (ARFTG)
Page numbers / Article number 1-4
Publisher's name IEEE
Publisher's address (city only) Piscataway, NJ, United States
Publication date 2026-1-1
Conference name 107th ARFTG Microwave Measurement Conference
Conference date 12 June 2026
Conference place Boston, MA, USA
ISSN 2767-8776
DOI 10.1109/ARFTG68740.2026.11614637

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Name of Call / Funding Programme
Metrology Partnership 2025: Integrated European Metrology