EMRP project Metrology of small structures for the manufacturing of electronic and optical devices (IND17 Scatterometry) will provide a scatterometry reference standard, also suitable for testing AFM and SEM devices that will add traceability to scatterometric measurements and make them comparable to microscopic methods.
IND17 JRP-Partners will be presenting work of the JRP during EOSAM 2014, the European Optical Society Annual Meeting, in a topical meeting entitled 'Frontiers in optical metrology' and during the International Workshop on Scatterometry.
