The combination of scanning probe microscopy, optical interferometry and x-ray interferometry

Project Description

Building on the success of the collaboration between PTB, NPL & IMGC in constructing the combined optical and x-ray interferometer facility (COXI) for calibrating displacement transducers, PTB and NPL are collaborating by combining x-ray interferometry with scanning probe microscopy. This work is proving to be very successful and led to an Institute of Physics Select publication. PTB and NPL have decided to formalize the collaboration and are considering the possibilities for combining optical and x-ray interferometry with scanning probe microscopy. The principal application for the combination of these techniques will be the investigation of long range variations in the periodic structure of artifacts used for the calibration of scanning probe microscopes. Additionally, the collaborators will attempt to seek industrial interest for the development of the combination of these techniques.

Final Report 2008-09-05

This project continued the ongoing collaboration between NPL and PTB in the field of x-ray interferometry, but with the addition of scanning probe microscope technology. The aim was to investigate the application of x-ray interferometry as a traceable length metrology technique to the measurements made using an SPM. Highlights of the project included:

• A paper published by the NPL and PTB authors won an award from the Worshipful Company of Scientific Instrument makers, for best paper in Measurement Science and Technology
• Another paper was published in MST on a feasibility study of putting an AFM on COXI
• Potential of individual FP6 bid was explored but no application made
• NPL scientist worked at PTB Nov-Dec 2003
• AFM with Z axis metrology was designed for use with XRI
• Andrew Yacoot (NPL) spent another year working at PTB
• AFM was also designed to be used to investigate tip-sample interactions
• AFM fully evaluated
• NPL moved COXI system to new building
• Shorter range operation planned
• Paper published: Meas. Sci. Technol. 14 (2003) N59–N63
• New method developed for fast scanning of x-ray interferometers
• Effort then concentrated on the development of the AFM for tip sample interaction studies
• A new project (EURAMET 868) has been formed to be more inclusive of the AFM work rather than the instrumentation. This project is ongoing.
• Experience from this project has been used as underpinning R&D for the EMRP JRP NANOTRACE which both NPL and PTB are participating in. As future work will be covered by NANOTRACE, there is no further need to continue this separate project.