Pilot study: Calibration of conductive probe Atomic Force Microscopy (C-AFM)
Project Description
As key output of the Joint Research Project 20IND12 Electrical nanoscale metrology in industry (ended on 31 August 2024), reference samples have been developed and validated for the calibration of C-AFM in terms of resistance and current for the ranges (1 kW – 1TW) and (10 fA – 1 µA) with a relative uncertainty of a few percent.
This pilot study should compare calibrations of C-AFM with uncertainties of the same order for the aforementioned resistance and current ranges. This comparison will consist for each participant to:
- calibrate their own C-AFM with a travelling calibration sample by LNE
- measure resistance and current on a second travelling sample used as “unknown sample”
For this pilot study, C-AFM will operate preferably in spectroscopic mode (I-V) and optionally in image mode. Both travelling samples will be provided by LNE.
Progress Report 2025-12-16
As key output of the JRP 20IND12 Elena, reference samples have been developed and validated for the calibration of C-AFM in terms of resistance and current for the ranges (1 kW – 1TW) and (10 fA – 1 µA) with a relative uncertainty of a few percent.
This Pilot study aims at comparing calibrations of C-AFM with uncertainties of the same order for the aforementioned resistance and current ranges.
This study consists for each participant to:
- calibrate their own C-AFM with a travelling calibration sample
- measure resistance and current on a second travelling sample used as “unknown sample”
Four partners CMI(CZ), DFM(DK), VTT(FI) and LNE (FR, measurements in blind test), have completed the measurements and provided the coordinator with technical reports.
Before and after these measurements, the samples have been calibrated by LNE.
After several unsuccessful attempts, TUBITAK (TR) was not in measure to provide values. PTB (DE) are currently performing measurements and a preliminary report has just been sent to LNE.
A final meeting with all participants is planned by the end of January 2026 for sharing results and deciding on a preparation of a possible paper for a publication in a peer-reviewed journal.