Intercomparison of Measurements on Step Height Standards by SPM

Project Description

Following the EUROMET 707 we would like to propose a new comparison on step height for scanning probe microscopes. The comparison should support the MRA. The standards used are similar to those of the Euromet 707, i.e. but with small lines of 6 µm and heights in the range from 7 nm to 2000 nm.

The project is in the feasibility stage. The comparison could start in autumn 2007. Possible partners have or will be informed by e-mail. Nevertheless, interested partners could inform the pilot lab. by an e-mail in which they announce their interest to participate with their scanning probe microscope. Please, send information about the measurement range (x, y, z) and the measurement mode of the SPM (STM, contact SFM, non-contact SFM), too.

 Final Report 2011-09-07

The comparison has been completed and results are published in der KCDB.