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Intercomparison of calibration facilities for depth setting standards

Project Description

Depth setting standards can be used to obtain traceability in the sub-micrometer range for measuring equipment for roughness and form measurements. Therefore an accurate calibration of these standard is an essential link in the traceability chain. An intercomparison in this field would therefore be very helpful to ascertain the measurement capabilities of the equipment in use.

5 calibration standards with a groove width of 0.1 mm and nominal depths of 0.03, 0.06, 0.16, 0.63 and 1.6 E^m will be circulated. The grooves are square-shaped. The grooves are prepared on silicon substrates (37 mm diameter and 3 mm thick) and have been coated with chromium. It is anticipated that mechanical (stylus) and optical (interferential) techniques lead to comparable results; in case of structural siginificant differences, the two techniques will be treated separatedly.

A more detailed instruction will accompany the intercomparison set, and will mainly contist of instructions for handling the standards and a definition of 'groove depth' relating to the geometry of the standard.

EUROMET members who are interested to participate are asked to contact the proposer before March 1, 1994, and give informations about measurement capabilities, equipment und preffered periods for the intercomparison.



Length (L)
Dr H. Haitjema, VSL (The Netherlands)
Coordinating Institute
VSL (Netherlands)
Further Partners
VTT (Finland)
NIST (United States of America)


Reg. No.
Collaboration Type
Final Report