Digitalisation route for dimensional nanometrology

The EU considers nanotechnology to be a key enabling technology  with great potential to address many societal challenges. However, despite many years of research, the majority of Scanning Probe Microscopes (SPMs) used for nano-dimensional measuring are left uncalibrated, leading to measurement errors of tens of percent. The reason for this is that calibration samples generally only have one specific quality whereas nanometrology usually requires multiple measurements including position, form, roughness and size. To fully calibrate a SPM for all parameters requires multiple, expensive samples, is time consuming, complex, and error-prone.  There is also a lack of robust automated algorithms and over 100 existing SPM data storage formats – leading to low interoperability and further complexity.

This project will address these issues by developing four types of SI-traceable ‘smart’ calibration samples with intrinsically high metrological information, including ‘silicon steps’, lateral standards based on self-organised patterns and programmable virtual height and lateral standards. A library of automated data processing routines will be generated for evaluation and quality checking, allowing the propagation of calibration measurement data and metadata independent of user influence. It will also apply these results to other instrumentation and promote the use of machine-readable digital calibration certificates that allow all information on a sample to be transferred directly and automatically to all digitally supported processes.

Project results will be disseminated though good practice guides and benefit the entire nanotechnology chain, from instrument manufacturers, and SPM users, to new nanotechnology services and products including, semiconductors, optics, quantum devices, materials science, nanomedicine and many more.