Supplementary comparison on Nanometrology Standards
Project Description
At its meeting in October 2024, the EURAMET Technical Committee for Length, TC-L, decided upon a supplementary comparison on nanometrology standards (grating pitch and step height) in the range of 300 nm to 3 µm (grating pitch) and 20 nm to 100 nm (step height), with VTT as the pilot laboratory.
A goal of the supplementary comparisons for topics in dimensional metrology is to demonstrate the equivalence of routine calibration services offered by NMIs to clients, as listed in Appendix C of the Mutual Recognition Agreement (MRA).