New Traceability Routes for NanometrologyShort Name: NANOTRACE, Project Number: T3.J1.4
Dimensional measurements play a crucial role in almost every aspect of modern life where the role of nanotechnologies in Information and Communication Technology is growing. Today laser interferometers are the essential tool for metrology in semiconductor manufacturing where they are used for pattern placement measurements on photomasks and for position control in wafer scanners. The accuracy demands of dimensional measurements are rapidly growing.
The project provides a bridge between state-of-the art traceable displacement measurements by optical interferometers and future new ways and standards to provide traceability at the atomic scale.
Common path two-wavelength homodyne counting interferometer development
Measurement Science and Technology