Determination of form/topography of high-quality flats

Project Description

Establish a comparison of flatness standards for form/topography measuring instruments. This comparison will be the first one dealing with high-quality determination of form/topography of high-quality flats.

A high-quality flat artefact with a diameter of 330 mm, working diameter 300 mm, thickness of 70 mm, Zerodur, no coating, flatness RMS l/80 will be provided by the pilot laboratory.

Final Report 2016-07-04

The project has been completed and rusults are published esults published in an open access paper: Metrologia 54 (2017) 85–93 "Intercomparison of flatness measurements of an optical flat at apertures of up to 150 mm in diameter".

Length (L)
Michael Schulz, PTB (Germany)
Coordinating Institute
PTB (Germany)
Further Partners
National Metrology Institute of South Africa (ZA)
National Institute of Metrology (CN)