Atomic structure and annealing-induced reordering of ε-Ga2O3: A Rutherford backscattering/channeling and spectroscopic ellipsometry study

Zolnai Z., Petrik P., Németh A., Volk J., Bosi M., Seravalli L., Fornari R.
Keywords:

Ga2O3, Rutherford Backscattering, Spectroscopic Ellipsometry, Crystalline reordering and annealing

Document type Article
Journal title / Source Applied Surface Science
Volume 636
Page numbers / Article number 157869
Publisher's name Elsevier BV
Publisher's address (city only) Amsterdam, NX, Netherlands
Publication date 2023-11
ISSN 0169-4332
DOI 10.1016/j.apsusc.2023.157869
Language English

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