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Determination of the mechanical properties of nano-pillars using the nanoindentation technique

Zhi Li, Sai Gao, Frank Pohlenz, Uwe Brand, Ludger Koenders, Erwin Peiner
Keywords:

nano-objects, nano-pillar, nanoscale material testing, nanoindentation technique, size effect

Document type Article
Journal title / Source Nanotechnology and Precision Engineering
Volume 3
Page numbers / Article number 182-188
Publication date 2014
DOI 10.13494/j.npe.20130018
Web URL http://caod.oriprobe.com/issues/1510064/toc.htm

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Information

Project title (JRP)
NEW05: MechProNO: Traceable measurement of mechanical properties of nano-objects
Name of Call / Funding Programme
EMRP A169: Call 2011 Metrology for New Technologies