The gateway to Europe's
integrated metrology community.

Formation of luminescent defects in 4H-SiC upon ion irradiation and ns laser annealing

Zanelli G., Ditalia Tchernij S., Genovese M., Picollo F., Traina P., Campostrini M., Rigato V., Redolfi E., Sturari S., Amine N., Varzi V., Nieto Hernández E., Corte E., Andrini G., Fontan I., Forneris J.
Keywords:

Single-photon sources, Ion implantation, Silicon carbide, Silicon vacancy, Photoluminescence, Formation yield, Laser annealing, Color centers

Document type Article
Journal title / Source Scientific Reports
Volume 15
Issue 1
Publisher's name Springer Science and Business Media LLC
Publisher's address (city only) Dordrecht, GX, Netherlands
Publication date 2025-1-1
ISSN 2045-2322
DOI 10.1038/s41598-025-23259-6

Back to the list view

Information

Name of Call / Funding Programme
Metrology Partnership 2023: Normative