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Laser source for dimensional metrology: investigation of an iodine stabilized system based on narrow linewidth 633 nm DBR diode

Yacoot, Andrew (National Physical Laboratory, Hampton Road, Teddington, Middlesex, TW11 0LW), Rerucha, Simon, Pham, Tuan M, Cizek, Martin, Hucl, Vaclav, Číp, Ondřej and Lazar, Josef
Keywords:

optical metrology, DBR laser diode, frequency stabilization, laser interferometry, dimensional metrology, iodine stabilization, displacement measurement

Document typeArticle
Journal title / SourceMeasurement Science and Technology
Volume28
Issue4
Page numbers / Article number045204
Publisher's nameIOP Publishing
Publisher's address (city only)Temple Circus,Temple Way, Bristol, BS1 6BE, United Kingdom
Publication date 2017-02-16
ISSN0957-0233, 1361-6501
DOI10.1088/1361-6501/aa5ab9
LanguageEnglish

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