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Note: Nanomechanical characterization of soft materials using a micro-machined nanoforce transducer with an FIB-made pyramidal tip

Wollschläger N., Hiller K., Brand U., Gao S., Li Z., Pohlenz F.
Keywords:

MEMS, nanoindentation, soft materials

Document type Article
Journal title / Source Review of Scientific Instruments
Volume 88
Issue 3
Page numbers / Article number 036104
Publisher's name AIP Publishing
Publication date 2017-3
ISSN 0034-6748, 1089-7623
DOI 10.1063/1.4977474
Language English

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Information

Project title (JRP)
NEW05: MechProNO: Traceable measurement of mechanical properties of nano-objects
Name of Call / Funding Programme
EMRP A169: Call 2011 Metrology for New Technologies