Feasibility Study of a Piezo Actuator as a Potential Standard in Calibration for Roundness Instruments
Trych-Wildner A., Wildner K., Sosinowski P.calibration; roundness; step height standard; piezo actuator; interferometer
| Document type | Article |
| Journal title / Source | Sensors |
| Volume | 22 |
| Issue | 23 |
| Page numbers / Article number | 9312 |
| Publisher's name | MDPI AG |
| Publisher's address (city only) | Basel, Switzerland |
| Publication date | 2022-11-29 |
| ISSN | 1424-8220 |
| DOI | 10.3390/s22239312 |
| Web URL | https://www.mdpi.com/1424-8220/22/23/9312 |
| Language | English |