Interferometric step gauge for CMM verification

Widmaier T., Viitala R., Rantanen A., Laukkanen P., Esala V.P., Hemming B., Kuosmanen P., Lassila A.

CMM, verification, metrology

Document type Article
Journal title / Source Measurement Science and Technology
Volume 29
Issue 7
Page numbers / Article number 074012
Publisher's name IOP Publishing
Publication date 2018-6
DOI 10.1088/1361-6501/aabd2b
Language English

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