Interferometric step gauge for CMM verification
Widmaier T., Viitala R., Rantanen A., Laukkanen P., Esala V.P., Hemming B., Kuosmanen P., Lassila A.CMM, verification, metrology
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Volume | 29 |
| Issue | 7 |
| Page numbers / Article number | 074012 |
| Publisher's name | IOP Publishing |
| Publication date | 2018-6 |
| DOI | 10.1088/1361-6501/aabd2b |
| Web URL | http://iopscience.iop.org/article/10.1088/1361-6501/aabd2b |
| Language | English |