Wave front and phase correction for double-ended gauge block interferometry
Lassila A., Byman V.gauge block, interferometer, phase stepping, wavefront error, phase correction, surface roughness, length
Document type | Article |
Journal title / Source | Metrologia |
Peer-reviewed article | 1 |
Volume | 52 |
Issue | 5 |
Page numbers / Article number | 708–716 |
Publisher's name | IOP Publishing, Bureau International des Poids et Mesures |
Publisher's address (city only) | Bristol |
Publication date | 2015-9-24 |
ISSN | 0026-1394 |
DOI | 10.1088/0026-1394/52/5/708 |
Web URL | http://iopscience.iop.org/article/10.1088/0026-1394/52/5/708/pdf |
Language | English |