Wave front and phase correction for double-ended gauge block interferometry

Lassila A., Byman V.
Keywords:

gauge block, interferometer, phase stepping, wavefront error, phase correction, surface roughness, length

Document type Article
Journal title / Source Metrologia
Peer-reviewed article 1
Volume 52
Issue 5
Page numbers / Article number 708–716
Publisher's name IOP Publishing, Bureau International des Poids et Mesures
Publisher's address (city only) Bristol
Publication date 2015-9-24
ISSN 0026-1394
DOI 10.1088/0026-1394/52/5/708
Web URL http://iopscience.iop.org/article/10.1088/0026-1394/52/5/708/pdf
Language English

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