Dimensional Stability Validation and Sensor Calibration with Sub-nanometer Accuracy
Voigt Dirk, Bergmans Rob H.Optical metrology; dimensional stability; sensor calibration; displacement interferometry
| Document type | Proceedings |
| Journal title / Source | |
| Publication date | 2012-10 |
| Conference name | International Conference on Space Optics |
| Conference date | 2012 |
| Conference place | Ajaccio, France |
| Web URL | http://www.congrexprojects.com/custom/icso/2012/papers/FP_ICSO-123.pdf |