Determination of SiO2 and C layers on a monocrystalline silicon sphere by reference-free x-ray fluorescence analysis

Unterumsberger R., Pollakowski-Herrmann B., Lubeck J., Kolbe M., Holfelder I., Hönicke P, Weser J., Beckhoff B.

Avogadro project, X-ray fluorescence, quantification

Document type Article
Journal title / Source Metrologia
Volume 54
Issue 4
Page numbers / Article number 481-486
Publisher's name IOP Publishing
Publication date 2017-6-28
ISSN 0026-1394, 1681-7575
DOI 10.1088/1681-7575/aa765f
Language English

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